Titanium Kev Tsis Txaus Siab, TiSi2

Nyob zoo, tuaj sab laj nrog peb cov khoom!

Titanium Kev Tsis Txaus Siab, TiSi2

Titanium silicide kev ua tau zoo: zoo heev oxidation tsis kam nyob rau hauv siab kub, siv ua cov khoom ua kom zoo thaum tshav kub kub, lub cev qhov kub ntawm lub cev, thiab lwm yam.


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Titanium silicide, lub cev nyhav: 116.1333, CAS Tsis yog: 12039-83-7, MDL No .: mfcd01310208

EINECS No .: 234-904-3.

Titanium silicide kev ua tau zoo: zoo heev oxidation tsis kam thaum kub, siv ua cov khoom siv tiv thaiv tshav kub, cua sov lub cev kub, thiab lwm yam .Titanium silicide yog dav siv nyob rau hauv rooj vag, qhov chaw / tso dej, kev sib tshuam thiab ohmic sib cuag ntawm hlau oxide semiconductor (MOS), hlau oxide semiconductor teb nyhuv transistor (MOSFET) thiab dynamic mus saib nco (DRAM)

1) titanium txheej dej ua kom tsis muaj teeb meem yog npaj. Cov cuab yeej siv cov txheej txheem kev npaj ntawm titanium silicide barrier txheej muaj xws li thaj chaw tsis muaj tshuaj tua kab thiab lub cheeb tsam silicide sib cais los ntawm thaj chaw sib cais, thiab lub sab saum toj ntawm lub cuab yeej yog them nrog txheej txheej txheej txheej txheej sab nqaij tawv.

2) Ib hom nyob hauv-situ synthesized titanium silicide (Ti5Si3) cov khoom siv tam li cov roj hmab titanium carbide (Ti3AlC2) matrix puas tau npaj. Aluminium titanium carbide / titanium silicide composite cov khoom siv nrog cov siab huv thiab siab zog tuaj yeem npaj tau nyob rau hauv qis kub thiab lub sijhawm luv dua.

3) Sau ua haujlwm rau titanium silicide coated iav tau npaj. Ib qho xaum nyias yog tso rau ntawm ib qho ntab iav substrate lossis silicon zaj duab xis yog tso ntawm lawv. Lub tshuab ua kom lub zog thiab tshuaj tiv thaiv kev tiv thaiv ntawm cov kua nplaum xim tuaj yeem txhim kho los ntawm kev npaj cov yeeb yaj kiab ntawm titanium silicide thiab silicon carbide lossis ntxiv me me ntawm cov nquag ua pa lossis nitrogen rau hauv zaj duab xis. Cov kev tsim muaj feem cuam tshuam rau lub hom tshiab ntawm cov iav pleev xim uas ua rau lub luag haujlwm ntawm dimming thiab cua sov rwb thaiv tsev thiab qis hluav taws xob iav .4) cov khoom siv hluav taws xob semiconductor tau npaj, uas suav nrog silicon substrate, ntawm qhov rooj vag, ib qhov chaw thiab cov kua dej tau tsim los. , txheej txheej insulating yog tsim nruab nrab ntawm lub rooj vag thiab silicon substrate, lub rooj vag yog tsim ntawm polysilicon txheej ntawm txheej insulating thiab ib txheej titanium silicide txheej ntawm polysilicon txheej, ib txheej tiv thaiv yog tsim ntawm titanium silicide txheej, thiab kev tiv thaiv txheej, titanium silicide txheej, polysilicon txheej thiab txheej insulating yog ib puag ncig los ntawm Muaj peb txheej txheej txheej txheej, uas yog silicon nitride kis phab ntsa txheej, hydrophilic txheej thiab silicon oxide sib txawv phab ntsa txheej los ntawm sab hauv rau sab nraud. Titanium silicide txheej yog tsim los ntawm cov txheej txheem electrode thiab ntws electrode, sab hauv txheej dielectric txheej yog tsim ntawm silicon substrate, thiab cov qhov rai sib txuas qhib tau tsim nyob rau sab hauv txheej dielectric txheej. Los ntawm kev siv cov txheej txheem thev naus laus zis, tus qauv siv hluav taws xob tuaj yeem ua tiav cov hluav taws xob kab hluav taws xob thiab cov hlau nyob rau hauv lub qhov rais sib txuas, thiab yuav tsis muaj luv luv qhov tshwm sim.

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